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    Dicing of the Wafer Testing and Inspection of a Single ASIC: • Probe Station and Microscope Etching: • UBM 1 • UBM 2 . 3 Process Flow Chart – Bonding ASIC: • Bumped, Diced and Tested Final Testing of the Tile Bonding at Low Temperatures Detector Conductor Passivation Si UBM 1 UBM 2 UBM 3 Photoresist Mask CdTe Contact Metallization 1 Metal 1 - Metal 2 Alloy Legend: Solder Mask Contact ...

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  • Semiconductor Manufacturing Execution Systems Siemens

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